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MLX90830 Triphibian™ MEMS Pressure Sensor IC
Melexis MLX90830 Triphibian™ MEMS Pressure Sensor IC is a packaged, factory-calibrated, absolute pressure sensor measuring spans from 2 bar to 70 bar. The sensors output an analog ‘ratiometric’ output where the output voltage ratio divided by the supply voltage has a linear relationship to the pressure. The MLX90830 comprises a MEMS pressure sensor element and an interface chip with CMOS technology. This optimized solution exhibits excellent EMC performance, and the DSP-based signal interface provides outstanding initial accuracy. A smart package and die assembly concept enables high output stability over life, even in stringent automotive temperature and stress conditions. The MEMS pressure sensor element uses the Triphibian technology. This suspended cantilever design is inherently more robust than rear-side exposed solutions, which still experience a pressure differential between the glass pedestal and wire bonding sides. The pressure equalization principle is also valid for frozen media.
